{"id":16973,"date":"2018-10-17T11:25:55","date_gmt":"2018-10-17T11:25:55","guid":{"rendered":"https:\/\/thomsongroup.com.au\/?post_type=product&#038;p=16973"},"modified":"2025-05-28T14:56:31","modified_gmt":"2025-05-28T04:56:31","slug":"halo-qrp","status":"publish","type":"product","link":"https:\/\/thomsongroup.com.au\/product\/halo-qrp\/","title":{"rendered":"HALO QRP"},"content":{"rendered":"<h3>Protect your process with the HALO QRP<\/h3>\n<p>Modern semiconductor deposition processes \u2014 from low-temperature epitaxy to ALD and MOCVD \u2014 operate routinely at chamber pressures far below atmosphere and approach the single-digit torr range. At the same time, process temperatures are continuously decreasing. Under these conditions, residual moisture in the chamber poses a significant threat to process quality and production yields.<\/p>\n<p>Tiger Optics\u2019 HALO QRP is optimised to operate under these low-pressure conditions and deliver exact and reliable real-time measurement to verify moisture residue in, for example, the load lock, transfer and process chambers before H2O contaminants compromise the subsequent process step. Based on Tiger Optics\u2019 proven Continuous-Wave Cavity Ring-Down Spectroscopy (CW-CRDS) technology, the HALO QRP sets new standards in ease-of-use and measurement precision for this application, and operates at chamber pressures as low as 1 Torr.<\/p>\n<h3>Designed for trace level moisture analysis in low pressure (&lt;50 Torr) applications, the HALO QRP offers:<\/h3>\n<ul>\n<li>Moisture detection at partial pressure of 1 \u00b5Torr and below<\/li>\n<li>Absolute accuracy and excellent precision<\/li>\n<li>Wide dynamic range\u2014over four orders of magnitude<\/li>\n<li>Low cost of ownership and operational simplicity<\/li>\n<li>Clean technology\u2014no external calibration gases required<\/li>\n<li>Compact analyzer footprint, also available as OEM module for equipment\/system integration.<\/li>\n<\/ul>\n<h3>Detection Limit and Sensitivity in Concentration Units (ppb)<\/h3>\n<p><img fetchpriority=\"high\" decoding=\"async\" class=\"alignnone size-full wp-image-16974\" src=\"https:\/\/thomsongroup.com.au\/wp-content\/uploads\/2018\/10\/QRP-LDL-Chart.png\" alt=\"QRP LDL Chart\" width=\"600\" height=\"341\" srcset=\"https:\/\/thomsongroup.com.au\/wp-content\/uploads\/2018\/10\/QRP-LDL-Chart.png 600w, https:\/\/thomsongroup.com.au\/wp-content\/uploads\/2018\/10\/QRP-LDL-Chart-300x171.png 300w, https:\/\/thomsongroup.com.au\/wp-content\/uploads\/2018\/10\/QRP-LDL-Chart-53x30.png 53w, https:\/\/thomsongroup.com.au\/wp-content\/uploads\/2018\/10\/QRP-LDL-Chart-64x36.png 64w\" sizes=\"(max-width: 600px) 100vw, 600px\" \/><\/p>\n<h3>Applications<\/h3>\n<ul>\n<li>Gas Quality Control<\/li>\n<li>UHP Ammonia &amp; High-Brightness LEDs<\/li>\n<li>Research &amp; Development<\/li>\n<li>Semiconductor Process Tools.<\/li>\n<\/ul>\n<p><a class=\"fasc-button fasc-size-xlarge fasc-type-glossy fasc-rounded-medium\" style=\"background-color: #1a4f7b; color: #ffffff;\" target=\"_blank\" rel=\"noopener\" href=\"https:\/\/thomsongroup.com.au\/wp-content\/uploads\/2025\/05\/Process-Insights_HALO-QRP_DS_v25-1.pdf\">Download Data Sheet<\/a><\/p>\n","protected":false},"excerpt":{"rendered":"<p>Protect your process with the HALO QRP Modern semiconductor deposition processes \u2014 from low-temperature epitaxy to ALD and MOCVD \u2014 operate routinely at chamber pressures far below atmosphere and approach the single-digit torr range. At the same time, process temperatures are continuously decreasing. Under these conditions, residual moisture in the chamber poses a significant threat [&hellip;]<\/p>\n","protected":false},"featured_media":20836,"template":"","meta":{"_acf_changed":false,"site-sidebar-layout":"default","site-content-layout":"default","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"pwb-brand":[232,233],"product_brand":[],"product_cat":[201,239,204],"product_tag":[],"class_list":{"0":"post-16973","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"pwb-brand-laboratory-scientific","7":"pwb-brand-stack-process-cems","8":"product_cat-gases","9":"product_cat-process","10":"product_cat-specialised-products","11":"yith_product_brand-tiger-optics","12":"desktop-align-left","13":"tablet-align-left","14":"mobile-align-left","16":"first","17":"instock","18":"shipping-taxable","19":"product-type-simple"},"acf":[],"brands":[{"id":232,"name":"Laboratory &amp; Scientific","slug":"laboratory-scientific"},{"id":233,"name":"Stack, Process &amp; CEMS","slug":"stack-process-cems"}],"_links":{"self":[{"href":"https:\/\/thomsongroup.com.au\/wp-json\/wp\/v2\/product\/16973","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/thomsongroup.com.au\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/thomsongroup.com.au\/wp-json\/wp\/v2\/types\/product"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/thomsongroup.com.au\/wp-json\/wp\/v2\/media\/20836"}],"wp:attachment":[{"href":"https:\/\/thomsongroup.com.au\/wp-json\/wp\/v2\/media?parent=16973"}],"wp:term":[{"taxonomy":"pwb-brand","embeddable":true,"href":"https:\/\/thomsongroup.com.au\/wp-json\/wp\/v2\/pwb-brand?post=16973"},{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/thomsongroup.com.au\/wp-json\/wp\/v2\/product_brand?post=16973"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/thomsongroup.com.au\/wp-json\/wp\/v2\/product_cat?post=16973"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/thomsongroup.com.au\/wp-json\/wp\/v2\/product_tag?post=16973"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}